The measurement of ferroelectric thin films using piezo force microscopy

نویسندگان

  • M G Cain
  • S. Dunn
  • P. Jones
چکیده

The use of Atomic Force Microscopy to evaluate the properties of ferroelectric thin films is often associated with poor contrast images and quantitative analysis is often not possible. In this paper elements of the metrology associated with this technique are explored, and results comparing different materials types and surface cleanliness are described.

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تاریخ انتشار 2004